Electrical characterization of photo - oxidized Si 1 x y Ge x C y films
نویسندگان
چکیده
Strained silicon germanium carbon (Si1 x yGexCy or SiGeC) on silicon was oxidized using a novel photo-oxidation process. The growth rate of the oxide was investigated and found to depend heavily on the germanium and carbon concentrations. MOS capacitors were fabricated with the resulting oxide and electrical characterization was done. The SiGeC MOS capacitors proved to have high leakage current through the gate oxide. The leakage current was found to be highly dependent on carbon concentration, and to a lesser degree, on germanium concentration, as well. Fixed oxide charge and interface state density were found to increase by a factor of ten over photo-oxidized silicon. 2004 Published by Elsevier B.V.
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